Are Relative Sensitivity Factors Transferable Among SIMS Instruments?

Several reports from SIMS-VI dealt with the systematic behavior of SIMS relative sensitivity factors (RSF's) for trace elements implanted in silicon and analyzed with oxygen or cesium ion bombardment [1,2]. These previous studies raised the question of whether a limited set of RSF's for selected elements in silicon can be used to generate RSF's in the same matrix for the remainder of the periodic table, and whether RSF's are transferable among SIMS instruments of similar or different designs.