Coupled Micromechanical Drumhead Resonators With Practical Application As Electromechanical Bandpass Filters

This paper discusses the theoretical and experimental behavior of coupled mechanical resonators viewed as potential elements of high-Q electromechanical bandpass filters. Results are presented for micromachined structures with natural frequencies in the MHz regime. The highest-order device studied had 20 perimeter-connected drumhead resonators arranged in a closed circle and functioned close to prediction with no frequency trimming.