Coupled Micromechanical Drumhead Resonators With Practical Application As Electromechanical Bandpass Filters
01 November 2002
This paper discusses the theoretical and experimental behavior of coupled mechanical resonators viewed as potential elements of high-Q electromechanical bandpass filters. Results are presented for micromachined structures with natural frequencies in the MHz regime. The highest-order device studied had 20 perimeter-connected drumhead resonators arranged in a closed circle and functioned close to prediction with no frequency trimming.