Defect-coupled diffusion of boron in extrinsic conditions.
01 December 1987
This memorandum investigates the role of defects in the diffusion of boron in silicon under extrinsic conditions. The form of the diffusivity is rewritten to make the presence of each charged defect explicit, and this form is used to extract coefficients from experimental measurements of diffusivity under extrinsic conditions in inert and oxidizing ambients.