Deposition of Tb sup (3+): Y sub 3 Al sub 3 Ga sub 2 0 sub (12) cathodoluminescent thin films by RF-sputtering.

Luminescent Tb sup (3+):Y sub 3 Al sub 3 Ga sub 2 0 sub (12) films were prepared by RF-sputtering in a planar magnetron system. The cathodoluminescent efficiency of the films was studied as a function of deposition parameters and the post- deposition heat treatment. Sputtered phosphor's performance was evaluated in CRT's. The optimized sputtered films were shown to match in peak line brightness the state-of-the-art particulate phosphor screens, and to have a better resolution.