Design for Reliability of MEMS / MOEMS for Lightwave Telecommunications (01 January 2001)

Optical Micro-Electro-Mechanical Systems (Optical MEMS, or MOEMS) comprise a disruptive technology whose applications to telecommunications networks is transforming the horizon for lightwave systems. The influences if materials systems, processing subtleties, and reliability requirements. on design flexibility, functionality and commercialization of MOEMS are complex. 

A tight inter-dependent feedback loop between Component/Substem/System Design, Fabrication, Packaging, Manufacturing and Reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating their development into commercial offerings.