Design of 25 nm SALVO PMOS Devices

The concept and designs of novel Self-Aligned Local-channel V-gate by Optical lithography (SALVO) devices are presented. SALVO uses optimized local-channel doping to sharpen the lateral junctions, in order to minimize Short Channel Effect for gate lengths down to 25 nm. In addition, it utilizes the replacement-gate design with inner spacers to facilitate integration of alternative gate stack materials and to extend the application of optical lithography. SALVO PMOS designs with both metal gate and poly-metal gate electrodes were studied, the latter proving capable of delivering high performance 25 nm PMOS with currently manufacturable processes.