Determination of the Si/Si sub 1-x Ge sub x Interfacial Roughness on the Atomic Level by Quantitem.

Quantitem is a new electron microscopic approach capable of mapping the composition with near-atomic resolution and sensitivity in general crystalline systems. Unlike chemical mapping [1], it does not require the presence of chemical reflections, and can this be used to examine general chemical changes in crystals along any (zone-axis) orientation.