Digital implementation of the Q-C method.

Computer controlled hardware and software needed for digital implementation of the Q-C method are described. Incorporation of a program that generates ideal data permits debugging and complete verification of the analysis routines. An error sensitivity check shows the parameters that must be measured most carefully are the device area, oxide capacitance, and the voltage independent capacitance in series with the MOS capacitor. The digital technique was found to provide advantages in convenience, speed, accuracy and versatility when implementing the Q-C method.