Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000x1000-Port Optical Crossconnect
23 March 2003
We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations.
Two hermetically sealed mirror arrays were used to build a non-blocking 1000x1000- port optical cross-connect switch with 3.5dB maximum insertion loss.
