Dynamic control and modal analysis of coupled nano-mechanical resonators

We present measurements on nanomechanical resonators allowing full in situ tuning of their dynamic properties, including higher-order nonlinearities (up to fifth order) and the mechanical quality factor Q. This is accomplished by gating electrodes and balancing resonators, similarily to a classical tuning fork. A detailed modal analysis is performed and reproducibility of the device response is verified. Eigenfrequencies are in the range of 40 to 70 MHz, and quality factor rises up to Qsimilar to6x10(3). (C) 2003 American Institute of Physics.