Elastic stiffness and thermal expansion coefficient measurements of NBH.
01 January 1985
The temperature dependent stress of Nitrogen-Boron-Hydrogen (NBH) films was measured using an optically leveraged laser apparatus. The measurements were used to determine the values of E/1-v and alpha for NBH as a function of NH3/B2H6 ratio. Values of E/1-v = 5x10" dynes/cm(2) and alpha = 5x10(-6)K(- 1) were obtained for the NH3/B2H6 ratio were used in depositing x-ray mask membranes. The intrinsic and the thermal stresses that contribute to the measured stress were calculated. The contributions of these two stress components to film peeling is discussed.