Interfacial Chemistries for Nanoscale Transfer Printing

This paper introduces the use of SAMs as covalent "glues" and "release" layers for transferring material from relief features on a stamp to a substrate. This approach, which we refer to as nanotransfer printing (nTP), is a purely additive technique that can generate complex patterns of single or multiple layers of functional materials with nanometer resolution over large areas in a single process step. We demonstrate the versatility of nTP with SAMs by forming patterns with a range of geometrics on flexible and rigid substrates using both hard inorganic and soft polymer stamps. High performance metal-insulator-metal (MIM) capacitors printed onto plastic substrates with nTP illustrate its compatibility with flexible electronic systems.