Photon and ion beam induced reactions in metallo-organic films: Microchemistry to microelectronics.
01 January 1987
The photothermal chemistry of thin palladium acetate films when irradiated with continuous wave Ar sup + laser and the non-thermal chemistry induced by high energy ion irradiation (2 MeV He sup + and Ne sup + ions) have been studied. The photothermal decomposition induced by scanned laser irradiation leads to pure metal lines that, however, may exhibit pronounced periodic structure. This results from coupling of the rate of heating by absorption of the laser radiation with the rate of release of the heat of reaction, giving an "explosive" reaction front that propagates ahead of the laser beam. In contrast, He sup + ion beam irradiation produces smooth metallic-looking features that contain up to 20% of the original carbon and 5% of the original oxygen content of the film. Films irradiated with Ne sup + ions contained slightly lower amounts of carbon and oxygen residues, but the films' appearance varied with thickness.