Synthesis of Strained-Layer Superlattices by Metalorganic Chemical Vapor Deposition

Strained-layer superlattice (SLS) structures are composed of alternating thin layers of single-crystal materials having different lattice constants. Such SLS structures were first fabricated from the compound semiconductors GaAs and GaAsP in about 1971 by Blakeslee using hydride vapor phase epitaxy.