Trapping of Au in Si During Pulsed Laser Irradiation: A Comparison with Ion-Beam-Induced Segregation.
01 January 1988
Liquid-phase non-equilibrium segregation and trapping of Au in Si induced by Q-switched laser irradiation is reported. Depending on the incident laser energy density, irradiation results in either amorphization or recrystallization of a near surface layer. In the latter case, at interface velocities of 9 m/sec, the segregation coefficient is 0.1 and Au is trapped in near-substitutional lattice sites at concentrations of 0. 5 at%. These results are compared with recent data on solid- phase ion-beam-induced segregation, where Au at the amorphous- crystal interface is trapped on non-unique lattice sites.