UPMOS - A New Approach to Submicrometer VLSI
A novel self-aligned, raised contact structure, UPMOS, which provides shallow junctions, low series resistance, and minimizes the source/drain junction capacitance for MOS circuits is described.
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A novel self-aligned, raised contact structure, UPMOS, which provides shallow junctions, low series resistance, and minimizes the source/drain junction capacitance for MOS circuits is described.