Defect characterization using SEM-CCM: Relative contrast measurements.

The quantitative variation of defect contrast as a function of experimental parameters in SEM-CCM measurements has been investigated experimentally. The contrast was found to be a multivalued function in many cases. Three regimes are defined in terms of the defect spatial position, the junction depletion depth, and the electron beam range. We show that the interpretation of defect contrast depends critically on measurement regime and, secondarily, on local defect electrical properties.