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Evaluation by Photoluminescence of Processes to Improve GaAs

01 January 1987

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Gallium Arsenide is becoming an increasingly important material for microwave, optical, and high-speed electronic applications. This material is used to make semiconductor lasers, optical detectors, microwave oscillators, and specific application VLSI circuits. High quality materials are needed to create many of theses high performance devices. This report discusses the use of ion implantation and thermal annealing to improve the quality of bulk GaAs.