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Measurements of Transfer Inefficiency of 250-Element Undercut- Isolated Charge Coupled Devices

01 January 1973

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A new method of fabricating charge coupled devices1 (CCD) using the technique of undercut isolation has been reported recently. 2 A schematic cross section of a device made using this technique is shown in Fig. 1. The essential feature is a method of forming electrically isolated but self-aligned metal electrodes on two thicknesses of oxide. By connecting the electrodes in pairs, which may be done externally or using electrochemically plated regions on the device, as shown in Fig. 1, a two-level oxide structure 3 - 4 that may be operated in a two1 2 THE BELL SYSTEM TECHNICAL JOURNAL, JANUARY 1973 Fig. 1--Schematic longitudinal cross section of an undercut-isolated stepped-oxide CCD.