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Photon and Ion Beam-induced Chemistry of Palladium Acetate Films

01 December 1986

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Electrically conducting palladium features have been produced by laser and ion beam irradiation of thin palladium acetate films. Periodic structure observed in the laser-written metallic features is absent from the non-thermal ion beam-written features. Differences in decomposition mechanisms between the thermal laser process and the non-thermal ion beam process will be discussed.