Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties.

High T sub c superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y sub 2 O sub 3, BaF sub 2 and CuO powders. Transport measurements of the films showed a sharp resistive T sub c (R=0) at 89K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single crystal SrTiO sub 3 substrates (100) or (110) and followed by a post O sub 2 annealing at 825C.