Publications

Interconnect layers on integrated circuits are undergoing a great increase in complexity.

A common form of thin growth involves clustering on either a bare substrate (Volmer-Weber growth) or on an initial uniform layer (Stranski-Krastanov growth).

The deposition and processing of thin-film Nitinol, a shape memory alloy (SMA), is discussed and demonstrated.

For the new high temperature perovskite superconductors, thin film research is important for both science and technology.

The integrated sensor complementary electrode (ISCE) stress mapping tool has been created for process development and characterization of blank SCALPEL masks (4-in. format).

Highly oriented, epitaxial Y sub 1 Ba sub 2 Cu sub 3 O sub (7-x) (001) thin films were prepared on MgO(100) and SrTiO sub 3 (100) by molecular beam epitaxy.

The performance of a bipolar transistor is governed, in part , by the base transit time.

The research work in thin film organization of organic materials is still in infancy compared to that of inorganics.

Bulk p-type wafers prepared with HF and RCA cleaning were oxidized in an atmospheric pressure 0 sub 2 ambient with incandescent lamp heating.

The use of thin titanium dioxide (TiO sub 2) films as interlayers in trilayer resist schemes was investigated.