Ion scattering from surfaces and interfaces.

20 September 1985

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The use of MeV ion scattering for surface and interface analysis is described. Four main sections describe: 1) The origin of the surface sensitivity in high energy ion scattering. 2) The quantitative understanding of the magnitude of the surface scattering. 3) The experimental apparatus necessary for such studies. 4) The use of these concepts in surface and interface analysis of solids. An extensive listing of surface scattering measurements is also included.