Silicon micromachining for millimeter-wave applications

We present in this article a very low loss silicon micromachined coplanar technology. The design of the structures was achieved through three dimensional finite element method electromagnetic simulations. A silicon micromachined cavity resonating at 95 GHz with a quality factor greater than 9000 was realized. (C) 2000 American Vacuum Society. {[}S0734-2101(00)09202-2].