Silicon VLSI Technology.

Very-large-scale integration (VLSI) is the most advanced state of electronics technology. Since the beginning of the VLSI era in 1975, the fabrication technology has processed rapidly. The minimum feature length has decreased at an annual rate of 13%, while the component density of VLSI chips has increased by 40% per year. By year 2000, we will employ larger silicon wafers (~250 mm in diameter) smaller feature lengths (~2microns), and lower processing temperatures (