Simultaneous analysis of boron and phosphorus in deposited glasses by inductively coupled plasma atomic emission spectroscopy with internal standardization.
01 January 1989
An inductively coupled plasma atomic emission spectrophotometric (ICP-AES) method with internal standardization has been developed for the analysis of deposited glass films. The method is very accurate and reliable, based on analyses of NBS standard reference materials, and on comparison with other techniques used for deposited glass film analysis.