Excimer Laser Projection Patterned Deposition of Aluminum Using Alkyl-Aluminum Precursor Molecules.

Projection-patterned deposition of Al is highly desirable for mass production applications in integrated circuit manufacture. The pitfalls of developing a truly manufacturable process, however, are numerous. The following is a brief review of the evolution of our efforts to do laser-assisted chemical vapor deposition of Al including our successes as well as our failures. The status of our present understanding of the depositions we have performed as well as a discussion of the future prospects for projection-patterned Al are included.