Fast Hot-Carrier Aging Method of Charging Damage Measurement

01 January 1999

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We have developed a fast hot-carrier stress measurement method for plasma-charging damage. Stress time as short as 1 second can be used to age n-channel transistor without using excessively high acceleration voltage. If stress are carried out to 10% degradation, one can obtain the intrinsic damage free hot-carrier lifetime without the help of a reference device.