Fiber optic photoluminescence setup for spatially resolved measurements

Spatially resolved photoluminescence is used as a nondestructive tool to characterize semiconductor epitaxial wafers with a resolution better than the device dimensions. In this paper, we describe a novel photoluminescence measurement setup using fiber optic techniques for luminescence excitation and detection in a very simple confocal arrangement. A final spatial resolution as small as 5 mu m +/- 0.5 mu m together with the compact design makes it very attractive.