Fine Line Technology: Impact of Dry Plasma Processing
01 January 1987
Integrated circuit (IC), hybrid circuit (HC), and printed circuit (PC) microelectronics manufacturing are moving toward a more unified industry. There are "forces of change" within the industry which are moving PC manufacturing towards a dry plasma processing revolution.
This revolution has the potential to provide the smooth surfaces, good adhesion, repeatability, and accuracy needed for the fine line technology of the future.