Growth and Characterizations of Bi-Sr-Ca-Cu-O Superconducting Thin Films by RF Magnetron Sputtering

Superconducting thin films (0.04 to 1.0micron thick) of Bi- Sr-Ca-Cu-O compounds have been grown on both MgO(100) and SrTiO sub 3 (100) single crystal substrates using an rf magnetron sputtering technique. A composite target was used with a nominal composition of Bi:Sr:Ca:Cu = 1.0:0. 78:0.54:0.93. The as-deposited films have a composition of Bi:Sr:Ca:Cu = 1.0:0. 74:0.69:1.16 (+-5%) as determined by Rutherford backscattering spectrometry (RBS).