High Resolution Liquid Metal Time of Flight Mass Spectrometry on Electronic Materials.

This paper will describe the design and capabilities of a liquid gallium ion source and secondary ion imaging system which was added to an existing Time Of Flight (TOF) Laser Ionization Mass Analyzer (LIMA). The Liquid Metal Secondary Ion Mass Spectrometer (LMSIMS) offers improved spatial resolution depth resolution and ion imaging capabilities on conductive and insulating materials. The capabilities of the new system will be illustrated in the analysis of fiber optics, sub-micron imaging and dopant ion imaging of devices.