II. A prototype batch processing MBE apparatus.

This paper will be the later half of a chapter on possible approaches to a production Silicon MBE apparatus. The first half of the chapter, by E. Kasper, deals with a simplified single wafer apparatus customized to a narrow range of MBE device applications. This paper deals with a more flexible apparatus aimed at wafer throughputs of up to one dozen 200 mm wafers per hour (or sixty 3" wafers). The chapter will be published in the book "Silicon MBE", E. Kasper and J. C. Bean Eds., CRC Press.