Implementing Advanced Lithography Technology: A 100 MHz, 1 Volt Digital Signal Processor Fabricated with Phase Shifted Gates

To demonstrate the effectiveness of alternating aperture phase shift lithography for integrated circuit manufacturing, a demonstration device was designed and processed. A 2 million transistor integrated circuit was processed with a phase shifted gate level using 248 nm wavelength lithography. The lithographic results were confirmed by careful feature size measurements throughout the process sequence and finally by the performance of the devices themselves. Gate lengths were reduced from 240 to 120 nm, resulting in fully functional chips with 100 MHz circuit speed at 1.0 volt operation, more than a twofold speed improvement and a record for communication circuits of this type at a low supply voltage.