In-Situ Transmission Electron Microscopy of Surfaces and Surface Reactions

Plan-view high energy electron diffraction and imaging is shown to be very suitable for the study of ordered monolayers. This is because the magnitude of diffraction (-1% for Si at 100 kV) is strong enough to be detected yet weak enough to be kinematic. Quantitative analysis has been used on data obtained from a UHV transmission electron microscope. The structure of reconstructed Si surfaces during H sub 2 or 0 sub 2 attack is described.