Laser and Ion Beam-Induced Chemistry of Thin Metallo-Organic Films
07 June 1987
Metallic palladium features have been produced by focused laser- and ion beam-induced decomposition of palladium acetate films. Distinct geometries are observed in the photothermal laser process that vary as a function of laser intensity, scan speed and substrate material. Talk date 6/9/87, WN# 3112-02-1399 and Conformation verified 061887 dmz