Low-loss channelized WDM spectral equalizer using lightwave micromachines and autonomous power regulation

A 16-channel 100-GHz spacing WDM spectral equalizer having athermal grating multiplexer/demultiplexers and MEMS variable attenuators was demonstrated with 9.1 dB excess loss, >50 dB dynamic range and autonomous power regulation using self-powered optical limiters incorporating InGaAs photogenerators