Low microwave noise of AlGaN/GaN HEMTs fabricated on SiCopSiC substrates

Low microwave noise performance of AlGaN/GaN HEMTs fabricated on MOCVD epitaxial structures grown on composite substrates (SiCopSiC) is reported. They are made of a thin SiC single-crystal layer transferred on top of a thick polycrystalline SiC wafer. The transistor fabrication process is similar to the one developed for AlGaN/GaN devices on SiC substrate. A minimum noise figure of 0.12 dB with an associated gain of 14.8 dB at 3 GHz is found, showing the capability of gallium-nitride based devices for low noise microwave applications in the S-band.