Materials Synthesis Using Ion Beams.
01 January 1988
Ion implantation, because it is inherently a strongly nonequilibrium process, can add a totally new dimension to materials studies. A large variety of chemical elements may be readily introduced into a target substrate by ion bombardment at concentrations considerably higher than the normal solid solubilities. In addition, of course, the interaction of the accelerated ions with the target produces lattice defects. Both effects are being studied extensively in experiments directed at improving the properties of existing materials and synthesizing new and exotic materials having properties unattainable using conventional techniques.