MEMS-based MCM VCO for space applications

This paper presents the implementation and test of prototype RF MEMS based voltage controlled oscillators (VCO) for space applications. RF MEMS tunable capacitors based on a dual gap architecture have been manufactured with a thin film technology on silicon and have demonstrated high tuning ratio (Cmax/Cmin ~ 4) and high Q factors (up to 100) with a good reproducibility. These tunable capacitors have been integrated as frequency tuning element in the LC tank of multi chip modules (MCM) VCO operating around 1.6 GHz with a tuning range greater than 16% and a phase noise as low as -125 dBc/Hz at 1 MHz offset from the carrier