MEMS technology for the advancement of science

In this article we describe the basic principles and advantages and limitations of MEMS technology and present examples of experiments in which micromachines are used to do physical measurements that could not be done before. Microelectromechanical systems (MEMS) are miniature mechanical devices with micrometer size movable parts. These devices are playing key roles in many important areas, including health care, transportation, communications, defense systems and a wide array of consumer products. They are an emerging technology, which when applied to the field of physical sensors, offers not only an obvious advantage of being small and cheap, but more importantly, provides some unique experimental opportunities.