MEMS THERMAL IMAGERNEXT TERM WITH OPTICAL READOUT

A cantilever-based uncooled IR previous termimagernext term was developed utilizing a novel optical readout scheme based on inter-pixel interference. A series of small arrays (approximately 100 ? 100 pixels) were fabricated using 8-in. silicon previous termMEMSnext term processes. The array design and process development will be discussed and initial uniformity and imaging results presented. Future challenges in developing a direct-view IR previous termimagernext term will be addressed.