Model-order reduction of nonlinear MEMS devices through arclength-based Karhunen-Loeve decomposition

The integration of micro-mechanical structures with electronics has increased the demand for new CAD tools to support. Of the key importance for developing such CAD tools is the development of fast and accurate reduced models for coupled-domain nonlinear micro-electro-mechanical (MEM) devices. To overcome the shortcomings of conventional finite element based direct numerical dynamic models, a new technique for automatically generating reduced-order dynamic models for nonlinear MEM devices will be presented together with simulation results. The reduced models can greatly reduce the simulation time and be easily connected to a circuit simulator for complete system-level simulations