Molecular Beam Epitaxy Growth of CoSi sub 2 at Room Temperature.

Single crystal type B CoSi sub 2 thin layers have been grown on Si(111) by co-deposition at room temperature. The existence of a good quality CoSi sub 2 template layer on the surface prior to the co-deposition is essential. This requirement can be satisfied by either an annealed CoSi sub 2 thin layer or by a small amount of cobalt deposited at room temperature.