Preparation of superconducting thin films of Ba sub 2 YCu sub 3 O sub 7 by a novel spin-on/pyrolysis technique.

A technique is described for preparing superconducting cuprate thin films using wet chemical precursors. This new method is simple and inexpensive, and allows facile manipulation of film stoichiometry. A solution of metal acetates in aqueous acetic acid is spun on a substrate, pyrolyzed and heat treated. A 1600angstrom film of Ba sub 2 YCu sub 3 O sub 7 prepared by this method had a room temperature resistivity of 500micron OMEGA cm, T sub c (onset) of 90K, and R=O at 58K. It showed preferential orientation with the orthorhombic c axis perpendicular to the film, and random azimuthal orientation. The preparation and electrical and microstructural characterization of these films are discussed.