Process Modeling for Submicron Silicon Technology (NOT KNOWN IF PUBLISHED BECAUSE AUTHOR HAS LEFT AT&T)

The progress of silicon process technology provides continual challenges for the development and refinement of process models. Existing processing steps require more accurate modeling, and models for new processing steps must be introduced if simulation tools are to keep pace with the demands of device design and process integration. The potential benefits are also increasing rapidly, since the development cost has been doubling for successive generations of technology.