Properties of HTSC Films Prepared by Sputtering and In-Situ MBE Growth
10 October 1989
High quality, superconducting Y sub 1 Ba sub 2 Cu sub 3 O sub (7-x) thin films have been successfully produced by molecular beam epitaxy on MgO(100) at a substrate temperature ~650C. The in-situ growth was achieved by incorporating neutral oxygen radicals produced by a remote microwave-excited plasma in a flow-tube reactor. By enhancing the flow speed of the O sub 2 stream to minimize recombinations, we have demonstrated remarkable improvements in the superconducting properties.