Reconstruction of (100) Silicon/Silicide Interfaces

A 2 x 1 reconstruction has been observed at the (100) Si/NiSi sub 2 and (100) Si/CoSi sub 2 interface. The reconstruction has been found in both ion-implanted and MBE-grown material. Clear evidence for the reconstruction has been obtained from HREM images of cross sections and from transmission electron diffraction using [100] plan-view samples. Image- matching, using multi-slice programs, has been performed for HREM micrographs. Structural models of the reconstructed (100) silicon/silicide interface will be presented and discussed in the light of these results.