Si-on-Insulator for ULSI applications.

Silicon-on-sapphire has been used for many years in specialized military and space applications. Dielectric Isolation (DI) method has found an important niche in telephone switching systems and military bipolar applications. Recent years brought a flurry of activities that promise better Silicon-on-Insulator (SOI) wafers. In this paper an attempt is made to review the developments in the SOI field and to indicate if this may have an impact on the future ULSI technology.