Silicon-on-Insulator- Materials, Devices, and Future Prospects

Silicon-on-Insulator (SOI) technology offers significant advantages in design, fabrication, and performance of many semiconductor circuits. Recent advances in SOI material fabrication and circuit design have led to successful fabrication of complex high performance CMOS circuits with >10 sup 7 transistors. After over two decades of materials research and device studies, and some niche applications, SOI wafers are entering into the mainstream of CMOS technology.